Method for fabricating thick silicon nitride waveguides
This technology presents a novel method for fabricating thick silicon nitride waveguides through multi-layer deposition and thermal processing, enabling improved optical performance for advanced photonic applications.
Background:
Traditional fabrication of thick silicon nitride (SiN) waveguides faces challenges such as high stress in deposited films...
Published: 9/9/2026
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Inventor(s): Nicholas Fahrenkopf, Gerald Leake, Lewis Carpenter, Katrina Morgan
Keywords(s): Technologies
Category(s): Campus > AIM Photonics, Technology Classifications > Optics and Photonics
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