This technology provides an acoustic sensing device or directional microphone having greater sensitivity and reduced noise. The directional microphone or acoustic sensor comprises a rigid, one micron thick polysilicon membrane having dimensions of approximately 1 mm×2 mm. The membrane is supported upon its central axis by beams having torsional...
Inventor(s): Ronald Miles, Sanjay Sundermurthy, Colum Gibbons
Keywords(s): #SUNYresearch, Technology
Category(s): Technology Classifications > Medical Devices, Technology Classifications > Electronics