Ultra-Sensitive Single-Layer MEMS Capacitive Platform with Repulsive Softening
This invention introduces a MEMS capacitive platform that cancels bias-induced stiffening with co-planar “repulsive” electrodes, boosting displacement response by over 6× without increasing noise, enabling simpler, smaller, and more sensitive microphones and sensors.
Background:
Capacitive MEMS sensors and actuators require a DC...
Published: 10/3/2025
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Inventor(s): Johar Pourghader, Ronald Miles
Keywords(s): Technologies
Category(s): Campus > Binghamton University
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