Levitating MEMS Switch
Microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation
Technology Overview:
A microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation. The approach is of great utility for any MEMS component that has to recover easily from pull-in,...
Published: 4/26/2024
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Inventor(s): Shahrzad Towfighian, Mark Pallay
Keywords(s):
Category(s): Campus > Binghamton University, Technology Classifications > Electronics, Technology Classifications > Engineering
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