Portable High-Resolution AFM with Electrostatic Levitation

Background:

Conventional shock sensors, such as those used in automotive airbag deployment, rely on electronic processing units to interpret signals and trigger a response. These systems require complex circuitry, increase costs, and introduce risks of software or component failures. Existing sensing platforms also depend on external power, reducing reliability in critical safety applications. A solution is needed that can provide reliable, battery-free sensing by directly linking mechanical shock to electrical and mechanical response without complicated processing units.

Technology Overview:

This system integrates electrostatic levitation actuators with triboelectric nanogenerators to achieve self-powered sensing and actuation. The electrostatic actuator provides stable, linear z-displacements of 20–30 microns, overcoming pull-in collapse and nonlinear limits of traditional designs. A DC bias allows real-time tuning of resonant frequency, while the triboelectric nanogenerators convert mechanical motion into electrical signals and provide supplemental power. This dual-transducer system enables direct operation of microswitches when motion exceeds a threshold, eliminating the need for external power or signal processors. CMOS compatibility ensures low-cost fabrication and easy integration into compact platforms.

Advantages:

• Large, stable displacements (20–30 µm) for reliable actuation
• Real-time tunable resonant frequency with DC bias
• Self-powered operation via triboelectric nanogenerators
• Direct sensing-to-actuation without signal processing units
• Compact, portable design with microwatt-level power needs
• Eliminates pull-in collapse for broader actuation range
• CMOS-compatible for scalable, cost-effective integration
• Combines sensing and actuation in one platform

Applications:

• Automotive airbag deployment systems
• Self-powered fall detection alarms for elderly care
• Vibration monitoring for remote industrial machinery
• Environmental monitoring sensors for impact or seismic activity
• Portable, low-maintenance safety and security systems

Intellectual Property Summary:

• US Patent 12,091,313 – Utility Application 17/000,634, Filed August 24, 2020, Granted September 17, 2024
• US Publication US20210061648A1 – Published August 29, 2024

Stage of Development:

Prototype and Patented – Validated for self-powered shock and vibration sensing with demonstrated integration of levitation actuators and triboelectric nanogenerators. TRL ~5.

Licensing Status:

This technology is available for licensing.

Licensing Potential:

Ideal for automotive, healthcare, and industrial markets requiring compact, reliable, and maintenance-free shock and vibration sensors that operate without external power or complex processing.

Additional Information:

Experimental validation data, displacement tuning results, and triboelectric integration studies available upon request.