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Deuterized Low-K Dielectric Materials for TDDB Mitigation

A solution to the problem of decreased semiconductor performance caused by time dependent dielectric breakdown (TDDB).A simple, easily scalable and inexpensive process for replacing the hydrogen in low-k dielectrics with deuterium to improve semiconductor performance.Background: Low-k dielectrics are a class of materials used in the manufacture of nanoscale...
Published: 9/17/2020   |   Inventor(s): James Lloyd, Niaz Mahmud
Keywords(s): nanotechnology, semiconductors
Category(s): Technology Classifications > Nanotechnology, Campus > SUNY Polytechnic Institute

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