Interdigitated Comb Fins
Method of creating interdigitated fins on a planar microstructure to deflect in the direction normal to its plane that increases capacitive actuation and sensing.
Technology Overview:
This invention provides a method of creating interdigitated fins on a planar microstructure that is intended to deflect in the direction normal to its plane. ...
Published: 4/26/2023
|
Inventor(s): Ronald Miles, Weili Cui
Keywords(s): #SUNYresearch, Technologies
Category(s): Technology Classifications > Medical Devices, Technology Classifications > Electronics, Campus > Binghamton University
|