Method to Grow Reliable Ultrathin Ceramic Capacitors
Method to Grow Reliable Ultrathin Ceramic Capacitors
A new method for making ultrathin ceramic capacitors using a “nanolaminate cushion” that prevents breakdown and enables reliable, high-capacitance devices on flat or 3D surfaces. Uses low-temperature ALD for flexible and embedded applications.
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100× higher capacitance per volume than MLCCs
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Stable at sub-10 nm thickness, low leakage
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Works on 3D and flexible surfaces
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Low-temperature process (<300 °C)
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No electrolytes or rare materials
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Lower ESR/ESL for high-frequency use
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