Resist Enhancements for Sensitivity and Resolution
Photoresist layer manufacturing for use in a semiconductor component using a generated electric field.
Background:
Due to the unique properties of semiconductors, their use in modern computing/electronic technologies has found wide use in IC, diodes, LED, rectifiers, MOSFET, transistors, solar cells, and other computing materials. Semiconductor fabrication...
Published: 12/20/2023
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Inventor(s): Gregory Denbeaux
Keywords(s): material science, materials and chemicals, semiconductors, Technologies
Category(s): Technology Classifications > Materials and Chemicals, Campus > SUNY Polytechnic Institute
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