Chain-Scission Polyester PAG-Polymers Disclosure IV
A high-performance photoresist that improves extreme ultraviolet image resolution, line width roughness, and sensitivity.
Background:
Extreme ultraviolet (EUV) imaging is an optical technology that enables smaller feature sizes in semiconductor chips, which pushes device performance forward. It works by first producing a pattern by exposing a reflective...
Published: 7/11/2023
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Inventor(s): Robert Brainard
Keywords(s): Technologies
Category(s): Campus > SUNY Polytechnic Institute, Technology Classifications > Electronics, Technology Classifications > Energy, Technology Classifications > Imaging, Technology Classifications > Materials and Chemicals, Technology Classifications > Optics and Photonics
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