Semiconductor Annealing Monitoring
Provides real-time, in-situ monitoring of conductivity change in a doped semiconductor wafer that is being subjected to pulsed microwave annealing.
Background:
Certain semiconductor wafers are manufactured via a process called doping. During this process, a material (the dopant) is introduced into the semiconductor crystal to change its electrical...
Published: 12/21/2023
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Inventor(s): Fatemeh Shahedipour-Sandvik, Vincent Meyers
Keywords(s): biomedical, chemistry, microsystem, semiconductors, TAF, Technologies
Category(s): Campus > SUNY Polytechnic Institute, Technology Classifications > Electronics, Technology Classifications > Materials and Chemicals
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